MAGNETIC RECORDING HEADS AND THIN FILM TECHNOLOGIES
报告题目： Magnetic recording heads and thin film technologies
报告人： Dr.Mao Ming, Technical Director, Advanced process development, Device Technology Development,Magnetic Head Operation, Western Digital Corporation (WD), Inc. Fremont, CA
报告时间：2008年10月22日下午3：00
地 点：A515
报告摘要：
Household and workplace use of Terabytes-sized hard disk drives nowadays has become fairly common as the areal density of magnetic recording heads reaches 320 Gb/in2 in production scale. This rapid increase in areal density demands increasingly smaller critical dimensions of the recording heads and higher quality of recording performance. Many new head architectures and associated fabrication techniques have emerged. They have been successfully materialized as a result of significant advancement in both materials science and thin film processing technologies. The basic structure and operation of state-of-art magnetic record heads will be introduced and a variety of thin film deposition and processing techniques will be reviewed with the emphasis on the materials, process integration and performance of tunneling magneto-resistive read heads.
报告人简介：
Dr. Mao Ming gradugated from for physics in 1982; got M.Sc for experimental condensed matter in physics, Institute of Solid State Physics, Chinese Academy of Sciences, HeFei, China, in 1985; got Ph.D for experimental condensed matter physics, McGill University, Montreal, Canada, in 1993.He had worked in Zhejiang University, McGill University, Lawrence Livermore National Laboratory, Read-Rite Corporation and Blaze Network Products, Inc, as a Faculty lecturer, Research assistant, Postdoctoral Fellow, Physicist, Staff R&D Engineer, Staff scientist and Principal Engineer. From beginning of 2001 to end of 2007, he worked in Veeco Instruments, Inc as a Manager of Veeco West Coast Application Lab,. Director of Technology. From beginning of this year, He worked in Advanced process development, Device Technology Development, Magnetic Head Operation, Western Digital Corporation (WD), Inc. as a Technical Director.
Dr. Mao has got a lot of achievements:
¨ Conceptualizing and developing various production worthy new thin film deposition platforms for new processes and materials in applications for magnetic recording and specialty semiconductor industries.
¨ Developed production worthy advanced spin-valve Giant MagnetoResistive (GMR) films.
¨ Developed for low Resistance Area (RA) product Tunneling MagnetoRresistive (TMR) read head applications.
¨ Developed and demonstrated for the first time: pulsed DC reactive magnetron sputter deposition process; optimal magnetron sputter deposition process and drawn great interest from the industries for current new generation Perpendicular Magnetic Recording (PMR) write head applications; Nano-crystalline high resistive, soft magnetic CoFeHfO oxides, drawn great attention and interest from Intel Corp. for high frequency on-chip inductor applications; ultra-high rate ALD Al2O3 deposition process;
¨ ALD nano-laminated Al2O3/SiO2 films as an excellent insulator material; pulsed CVD Ru process with high quality conformal Ru depositions for PMR write head applications; 4× plus high rate reactive IBD processes for Dense Wavelength Division Multiplex filter typed optical coatings, a 3× increase in productivity; feasibility using IBD techniques for magnetic recording head applications; importance of deposition system base pressure in determining GMR multilayer film interface smoothness therefore interlayer exchange coupling strength and GMR values.
¨ Expert in scattering techniques: setup an in-house modern x-ray Lab with an 18 kW rotating anode x-ray diffractometer for high resolution and precision structural characterization of thin films, organic and inorganic materials; setup and conducted spin-polarized neutron scattering characterization of magnetization status of CoNi layers in interlayer exchange coupled CoNi/Cu multilayers using 4 spin-dependent scattering cross sections;mK low temperature and 7 Tesla high magnetic field neutron scattering characterization of critical behavior in single-crystal heavy-fermion superconductor UNi2Al3
¨ First demonstrated the formation of bulk amorphous metallic quaternary NiCuZrTi alloys by casting
Dr. Mao is author/co-author more than 60 scientific publications and 20 US patents．